Influence of magnetron configuration on CoCr films sputtered on flexible substrates

被引：15

作者：

Veldeman, J ^{[1
]}

Jia, H ^{[1
]}

Burgelman, M ^{[1
]}

机构：

[1] State Univ Ghent, Dept Elect & Informat Syst, B-9000 Ghent, Belgium

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1999年 / 193卷 / 1-3期

关键词：

PET substrate; DC magnetron sputtering; longitudinal magnetic thin films; ion bombardment;

D O I：

10.1016/S0304-8853(98)00416-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The aim of this work is to investigate the influence of the magnetron configuration on the magnetic properties of DC magnetron sputtered Co88Cr12 films on a PET substrate. The parameters of each magnetron configuration are calculated or measured. The influence of the most relevant sputtering parameters, such as a Cr underlayer and sputter pressure, is investigated for all configurations. The magnetic properties of the sputtered films were measured with a VSM. Microscopic characterisation of the films is done with XRD measurements. Changes in magnetic and microscopic properties of the films are explained in terms of charged particle bombardment of the substrate during sputtering. Using a Cr underlayer and a rather high pressure can improve the magnetic properties of the film drastically. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：128 / 131

页数：4

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