Phase-locked phase-shifting laser diode interferometer with photothermal modulation

被引：10

作者：

Suzuki, T ^{[1
]}

Zhao, XF ^{[1
]}

Sasaki, O ^{[1
]}

机构：

[1] Niigata Univ, Fac Engn, Niigata 9502181, Japan

来源：

APPLIED OPTICS | 2001年 / 40卷 / 13期

关键词：

D O I：

10.1364/AO.40.002126

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda /460. (C) 2001 Optical Society of America.

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页码：2126 / 2131

页数：6

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