Metal based single electron transistors operating at several Kelvin

被引：6

作者：

Altmeyer, S

Hamidi, A

Spangenberg, B

Kurz, H

机构：

[1] Inst. of Semiconduct. Electronics II, 52074 Aachen

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 06期

关键词：

D O I：

10.1116/1.588638

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Metal based single electron transistors fabricated by the step edge cut off process will be presented. Although standard electron beam lithography, dry etching and lift-off techniques were used, devices with tunnel capacitances down to 1.5 aF are realized. They are characterized at different temperatures ranging from 50 mK up to 77 K. Transistor operation at 4.2 K is demonstrated. Traces of the Coulomb blockade are observed up to 77 K. (C) 1996 American Vacuum Society.

引用

页码：4034 / 4037

页数：4

共 15 条

[1] A NEW CONCEPT FOR THE DESIGN AND REALIZATION OF METAL-BASED SINGLE-ELECTRON DEVICES - STEP-EDGE CUTOFF [J].

ALTMEYER, S ;

SPANGENBERG, B ;

KURZ, H .

APPLIED PHYSICS LETTERS, 1995, 67 (04) :569-571

[2] Step edge cut off - A new fabrication process for metal-based single electron devices [J].

Altmeyer, S ;

Spangenberg, B ;

Kuhnel, F ;

Kurz, H .

MICROELECTRONIC ENGINEERING, 1996, 30 (1-4) :399-402

[3] COULOMB BLOCKADE OF SINGLE-ELECTRON TUNNELING, AND COHERENT OSCILLATIONS IN SMALL TUNNEL-JUNCTIONS [J].

AVERIN, DV ;

LIKHAREV, KK .

JOURNAL OF LOW TEMPERATURE PHYSICS, 1986, 62 (3-4) :345-373

[4] Fabrication and physics of similar to 2 nm islands for single electron devices [J].

Chen, W ;

Ahmed, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2883-2887

[5] OFFSET MASKS FOR LIFT-OFF PHOTOPROCESSING [J].

DOLAN, GJ .

APPLIED PHYSICS LETTERS, 1977, 31 (05) :337-339

[6]

GOETZ M, 1994, J PHYS, V4, P223

[7]

GOETZ M, 1995, J APPL PHYS, V78, P5499

[8]

KOCH H, 1987, INT SUP EL C TOK, P281

[9] Fabrication of lateral tunnel junctions and measurement of Coulomb blockade effects [J].

Langheinrich, W ;

Ahmed, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (12B) :6956-6960

[10] SINGLE-ELECTRON TRANSISTORS - ELECTROSTATIC ANALOGS OF THE DC SQUIDS [J].

LIKHAREV, KK .

IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (02) :1142-1145

← 1 2 →