Preparation of YBa2Cu3O7-delta thin films by metal-organic chemical vapor deposition using liquid sources

被引：14

作者：

Ito, Y ^{[1
]}

Yoshida, Y ^{[1
]}

Mizushima, Y ^{[1
]}

Hirabayashi, I ^{[1
]}

Nagai, H ^{[1
]}

Takai, Y ^{[1
]}

机构：

[1] NAGOYA UNIV,DEPT ELECT ENGN,NAGOYA,AICHI 464,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 7A期

关键词：

MOCVD; superconductivity; YBCO; thin film; liquid MO-source;

D O I：

10.1143/JJAP.35.L825

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

YBa2Cu3O7-delta (YBCO) thin film was fabricated by metal-organic chemical vapor deposition (MOCVD) using newly developed liquid MO-sources (MO=metal-organic). The melting points of the MO-sources are lower than those of conventional MO-sources, and they have stable vapor pressure even in the liquid state. The MO-sources contain fluorine; however, when water was added to the flowing oxygen gas, the fluorine-to-oxygen ratio of the films was reduced to less than 0.08 at% as determined by secondary ion mass spectroscopy (SIMS). The reproducibility of the composition and the superconducting properties of the prepared films was excellent compared to that of films fabricated using conventional MO-sources.

引用

页码：L825 / L827

页数：3

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