Materials of LIGA technology

被引：78

作者：

Ehrfeld, W ^{[1
]}

Hessel, V ^{[1
]}

Löwe, H ^{[1
]}

Schulz, C ^{[1
]}

Weber, L ^{[1
]}

机构：

[1] Inst Mikrotech Mainz GmbH, D-55129 Mainz, Germany

来源：

MICROSYSTEM TECHNOLOGIES | 1999年 / 5卷 / 03期

关键词：

D O I：

10.1007/s005420050150

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The progress in microfabrication technologies is currently characterized by an increasing number of microproducts and corresponding efforts for cost effective mass fabrication. In this context, the development and utilization of new application specific materials has become one of the key challenges for the commercial production of miniaturized functional units. This applies, in particular, to the LIGA technique, a sequence of process steps combining deep lithography, microelectroforming and micromoulding, which offers an extremely broad spectrum of materials for the generation of ultraprecise three-dimensional microstructures. A wide variety of polymers, metals, metal alloys and ceramic materials are by now accessible for fabricating microdevices. There are practically no major limitations in selecting the desired material properties, e.g. in respect of mechanical stiffness or biocompatibility, optical transparency or magnetic properties, resistance against corrosion or whatever is required by the specific function of a microdevice.

引用

页码：105 / 112

页数：8

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