Scanning probe investigation of surface charge and surface potential of GaN-based heterostructures

被引:40
作者
Rodriguez, BJ [1 ]
Yang, WC
Nemanich, RJ
Gruverman, A
机构
[1] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA
[2] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.1869535
中图分类号
O59 [应用物理学];
学科分类号
摘要
Scanning Kelvin probe microscopy (SKPM) and electrostatic force microscopy (EFM) have been employed to measure the surface potentials and the surface charge densities of the Ga- and the N-face of a GaN lateral polarity heterostructure (LPH). The surface was subjected to an HCl surface treatment to address the role of adsorbed charge on polarization screening. It has been found that while the Ga-face surface appears to be unaffected by the surface treatment, the N-face surface exhibited an increase in adsorbed screening charge density (1.6 +/- 0.5x10(10) cm(-2)), and a reduction of 0.3 +/- 0.1 V in the surface potential difference between the N- and Ga-face surfaces. (C) 2005 American Institute of Physics.
引用
收藏
页码:1 / 3
页数:3
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