Micro-Raman study of electronic properties of inversion domains in GaN-based lateral polarity heterostructures

被引:35
作者
Park, M
Cuomo, JJ
Rodriguez, BJ
Yang, WC
Nemanich, RJ
Ambacher, O
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] N Carolina State Univ, Dept Phys, Raleigh, NC 27695 USA
[3] Tech Univ Ilmenau, Ctr Micro & Nanotechnol, D-98693 Ilmenau, Germany
关键词
D O I
10.1063/1.1570507
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electronic properties of inversion domains in a GaN-based lateral polarity heterostructure were investigated using micro-Raman spectroscopy. The piezoelectric polarization of each domain was calculated from strain determined via Raman scattering. The free carrier concentration and electron mobility were deduced from the longitudinal optical phonon-plasmon coupled mode. The electron concentration in the N-face domain was slightly higher than that in the Ga-face domain. It appears that during growth, a larger number of donor impurities may have been incorporated into the N-face domain than into the Ga-face domain. (C) 2003 American Institute of Physics.
引用
收藏
页码:9542 / 9547
页数:6
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