Fabrication of a solution-processed thin-film transistor using zinc oxide nanoparticles and zinc acetate

被引:34
作者
Lee, Sul [1 ]
Jeong, Sunho [1 ]
Kim, Dongjo [1 ]
Park, Bong Kyun [1 ]
Moon, Jooho [1 ]
机构
[1] Yonsei Univ, Dept Mat Sci & Engn, Seoul, South Korea
关键词
ZnO; nanoparticles; transistor; carrier mobility;
D O I
10.1016/j.spmi.2007.04.036
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We have fabricated a solution-processed ZnO thin-film transistor without vacuum deposition. ZnO nanoparticles were prepared by the polyol method from zinc acetate, polyvinyl pyrrolidone, and diethyleneglycol. The solution-processable semiconductor ink was prepared by dispersing the synthesized ZnO in a solvent. Inverted stagger type thin-film transistors were fabricated by spin casting the ZnO ink on the heavily doped Si wafer with 200 nm thick SiO2, followed by evaporation of Cr/Au source and drain electrodes. After the drying and heat treatment at 600 degrees C, a relatively dense ZnO film was obtained. The film characteristics were investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). In order to obtain the electrical properties of the solution-derived transistor, the on-off ratio, threshold voltage, and mobility were measured. (c) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码:361 / 368
页数:8
相关论文
共 22 条
[1]   High-performance, solution-processed organic thin film transistors from a novel pentacene precursor [J].
Afzali, A ;
Dimitrakopoulos, CD ;
Breen, TL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (30) :8812-8813
[2]   Magnetic resonance studies of ZnO [J].
Carlos, WE ;
Glaser, ER ;
Look, DC .
PHYSICA B-CONDENSED MATTER, 2001, 308 :976-979
[3]  
Dimitrakopoulos CD, 2002, ADV MATER, V14, P99, DOI 10.1002/1521-4095(20020116)14:2<99::AID-ADMA99>3.0.CO
[4]  
2-9
[5]   High field-effect mobility zinc oxide thin film transistors produced at room temperature [J].
Fortunato, E ;
Pimentel, A ;
Pereira, L ;
Gonçalves, A ;
Lavareda, G ;
Aguas, H ;
Ferreira, I ;
Carvalho, CN ;
Martins, R .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 2004, 338 :806-809
[6]   Modeling of grain boundary barrier modulation in ZnO invisible thin film transistors [J].
Hossain, FM ;
Nishii, J ;
Takagi, S ;
Sugihara, T ;
Ohtomo, A ;
Fukumura, T ;
Koinuma, H ;
Ohno, H ;
Kawasaki, M .
PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2004, 21 (2-4) :911-915
[7]   Zinc oxide nanoparticles with defects [J].
Ischenko, V ;
Polarz, S ;
Grote, D ;
Stavarache, V ;
Fink, K ;
Driess, M .
ADVANCED FUNCTIONAL MATERIALS, 2005, 15 (12) :1945-1954
[8]   A soluble and air-stable organic semiconductor with high electron mobility [J].
Katz, HE ;
Lovinger, AJ ;
Johnson, J ;
Kloc, C ;
Siegrist, T ;
Li, W ;
Lin, YY ;
Dodabalapur, A .
NATURE, 2000, 404 (6777) :478-481
[9]   Chemical solution deposition of Zn1-xZrxO thin films as active channel layers of thin-film transistors [J].
Lee, JH ;
Lin, P ;
Ho, JC ;
Lee, CC .
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2006, 9 (04) :G117-G120
[10]   Green luminescent center in undoped zinc oxide films deposited on silicon substrates [J].
Lin, BX ;
Fu, ZX ;
Jia, YB .
APPLIED PHYSICS LETTERS, 2001, 79 (07) :943-945