Optofluidic maskless lithography system for real-time synthesis of photopolymerized microstructures in microfluidic channels

被引:148
作者
Chung, Su Eun [1 ]
Park, Wook [1 ]
Park, Hyunsung [1 ]
Yu, Kyoungsik [1 ]
Park, Namkyoo [1 ]
Kwon, Sunghoon [1 ]
机构
[1] Seoul Natl Univ, Sch Elect Engn & Comp Sci, Seoul 151744, South Korea
关键词
D O I
10.1063/1.2759988
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors propose an optofluidic maskless lithography technique that can dynamically synthesize free-floating polymeric microstructures inside microfluidic channels by selectively polymerizing photocurable resin with high-speed two-dimensional spatial light modulators. The combination of programable optical projection and microfluidic devices allows one to precisely control the timing and location of the photopolymerization process for microstructure fabrication. Real-time generation of microparticles with various shapes, sizes, ordering, and material contents are experimentally demonstrated. Long polymeric structures of which size is not limited by the exposure field of view can also be fabricated.
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页数:3
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