Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

被引：208

作者：

Hsueh, Ting-Jen

Chang, Shoou-Jinn

Hsu, Cheng-Liang

Lin, Yan-Ru ^{[1
]}

Chen, I.-Cherng

机构：

[1] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan

[2] Micro Syst Technol Ctr, Ind Technol Res Inst S, Tainan 709, Taiwan

[3] Natl Univ Tainan, Dept Elect Engn, Tainan 700, Taiwan

[4] Natl Cheng Kung Univ, Inst Microelect, Dept Elect Engn, Ctr Micro Nano Sci & Technol, Tainan 70101, Taiwan

来源：

APPLIED PHYSICS LETTERS | 2007年 / 91卷 / 05期

关键词：

GAS-SENSOR; GROWTH; NANORODS; ARRAYS;

D O I：

10.1063/1.2757605

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The authors report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 degrees C and increased from 36.0% to 61.5% at 230 degrees C. (c) 2007 American Institute of Physics.

引用

收藏

页数：3

相关论文

共 20 条

[11] Electrical characterization and hydrogen gas sensing properties of a n-ZnO/p-SiC Pt-gate metal semiconductor field effect transistor [J].

Kandasamy, S. ;

Wlodarski, W. ;

Holland, A. ;

Nakagomi, S. ;

Kokubun, Y. .

APPLIED PHYSICS LETTERS, 2007, 90 (06)

[12] THE ROLE OF NOBLE-METALS IN THE CHEMISTRY OF SOLID-STATE GAS SENSORS [J].

KOHL, D .

SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) :158-165

[13] Fabrication of highly ordered ZnO nanowire arrays in anodic alumina membranes [J].

Li, Y ;

Cheng, GS ;

Zhang, LD .

JOURNAL OF MATERIALS RESEARCH, 2000, 15 (11) :2305-2308

[14] Ordered semiconductor ZnO nanowire arrays and their photoluminescence properties [J].

Li, Y ;

Meng, GW ;

Zhang, LD ;

Phillipp, F .

APPLIED PHYSICS LETTERS, 2000, 76 (15) :2011-2013

[15] Zinc oxide thin film gas sensor for detection of acetone [J].

Sahay, PP .

JOURNAL OF MATERIALS SCIENCE, 2005, 40 (16) :4383-4385

[16] Growth of arrayed nanorods and nanowires of ZnO from aqueous solutions [J].

Vayssieres, L .

ADVANCED MATERIALS, 2003, 15 (05) :464-466

[17] Modified zinc oxide thick film resistors as NH3 gas sensor [J].

Wagh, MS ;

Jain, GH ;

Patil, DR ;

Patil, SA ;

Patil, LA .

SENSORS AND ACTUATORS B-CHEMICAL, 2006, 115 (01) :128-133

[18] A novel single chip thin film metal oxide array [J].

Wöllenstein, J ;

Plaza, JA ;

Cané, C ;

Min, Y ;

Böttner, H ;

Tuller, HL .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 93 (1-3) :350-355

[19] REACTION-MECHANISM OF ELECTROLESS METAL-DEPOSITION USING ZNO THIN-FILM (I) - PROCESS OF CATALYST FORMATION [J].

YOSHIKI, H ;

HASHIMOTO, K ;

FUJISHIMA, A .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (02) :428-432

[20] Pattern formation of Cu layer by photocatalytic reaction of ZnO thin film [J].

Yoshiki, H ;

Kitahara, H ;

Hashimoto, K ;

Fujishima, A .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (12) :L235-L237