Carrier generation and inherent off-stoichiometry in Zn, Sn codoped indium oxide (ZITO) bulk and thin-film specimens

被引:31
作者
Harvey, Steven P. [1 ]
Mason, Thomas O. [1 ]
Buchholz, D. Bruce [1 ]
Chang, Robert P. H. [1 ]
Korber, Christoph [2 ]
Klein, Andreas [2 ]
机构
[1] Northwestern Univ, Ctr Mat Res, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Tech Univ Darmstadt, Dept Mat Sci, Surface Sci Div, D-64287 Darmstadt, Germany
关键词
D O I
10.1111/j.1551-2916.2007.02135.x
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Electrical studies of the Zn, Sn codoped bixbyite (In2O3) phase (ZITO), a promising alternative to indium-tin oxide (ITO) for transparent conductor applications, indicate that an inherent cation off-stoichiometry in favor of Sn donors versus Zn acceptors dominates the defect chemistry of this important transparent conducting oxide. This was shown by bulk phase diagram and conductivity studies, thin-film electrical/optical measurements, and photoelectron spectroscopy on both bulk and thin-film specimens. The Sn-excess character explains the persistent n-type behavior of bulk ZITO, the relative redox insensitivity of codoped compositions, the existence of "special" (optimized conductivity) compositions in phase space for pulsed laser-deposited films, and the propensity for surface chemical depletion in both bulk and thin-film specimens.
引用
收藏
页码:467 / 472
页数:6
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