Heavy ion RBS characterization of multilayer coatings deposited through the sol-gel technique

被引：12

作者：

Aslanoglou, X ^{[1
]}

Assimakopoulos, PA ^{[1
]}

Trapalis, C ^{[1
]}

Kordas, G ^{[1
]}

Karakassides, MA ^{[1
]}

Pilakouta, M ^{[1
]}

机构：

[1] NCSR DEMOKRITOS, INST NUCL PHYS, GR-15310 ATHENS, GREECE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1996年 / 118卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(95)01080-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Multilayer reflecting thin films of the systems ZrO2-SiO2 and TiO2-SiO2 were deposited on glass surfaces using the sol-gel technique. A C-12 beam was utilized in RBS analysis to investigate the inner structure of these multilayer stacks. The layers showed uniform thickness and no evidence for significant diffusion between the layers was found. Optical Spectroscopy showed wavelength selectivity in the reflection of an 8-layer TiO2-SiO2 sample.

引用

页码：630 / 632

页数：3

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