Phase transition in ferroelectric SrBi2Ta2O9 thin films with change of heat-treatment temperature

被引:53
作者
Osaka, T [1 ]
Sakakibara, A
Seki, T
Ono, S
Koiwa, I
Hashimoto, A
机构
[1] Waseda Univ, Dept Appl Chem, Kagami Mem Lab Mat Sci & Technol, Shinjuku Ku, Tokyo 169, Japan
[2] Waseda Univ, Adv Res Ctr Sci & Engn, Shinjuku Ku, Tokyo 169, Japan
[3] Oki Elect Ind Co Ltd, Res & Dev Grp, Hachioji, Tokyo 193, Japan
[4] Tokyo Ohka Ind Co Ltd, Dept Res & Dev, Kanagawa 25301, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 02期
关键词
ferroelectric thin film; SrBi2Ta2O9; bismuth-layer-structure; pyrochlore; heat-treatment temperature; phase transition; chemical liquid deposition; all-alkoxide precursor solution;
D O I
10.1143/JJAP.37.597
中图分类号
O59 [应用物理学];
学科分类号
摘要
Changes in the composition and the crystal structure of micro-grains have been studied using transmission electron microscopy (TEM) and energy dispersive X-ray microanalysis in order to clarify the phase formation of ferroelectric SrBi2Ta2O9 (SBT) with heat-treatment at 650-750 degrees C. Micrograins crystallized at 650 degrees C begin to change to bismuth-layer-structure-family (BLSF) grains at temperatures exceeding 700 degrees C, and form pure-BLSF phase grains at 800 degrees C, Hence, a micrograins phase exists in thin films at 650-750 degrees C and we determined that the bismuth composition in these grains decreases. Using selected diffraction and high-resolution TEM, we found that a pyrochlore phase was formed in the bismuth-poor micrograins that were heat treated at 750 degrees C, The formation of pyrochlore made pure-phase BLSF difficult to obtain.
引用
收藏
页码:597 / 601
页数:5
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