共 125 条
[11]
BULLEMA JE, 2002, P 3 EUSP INT C EINDH, P257
[12]
Büttgenbach S, 2001, PROC SPIE, V4407, P126, DOI 10.1117/12.425292
[13]
BUTTGENBACH S, 2002, 13 INT S MICR HUM SC
[14]
BUTTGENBACH S, 2002, P 47 INT WISS K TU I
[15]
Recent developments in dimensional metrology for microsystem components
[J].
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
2002, 8 (01)
:3-6
[16]
Corbett J, 2000, CIRP ANNALS 2000: MANUFACTURING TECHNOLOGY, VOL 49/2/2000, P523
[17]
DELLMANN L, 2000, 13 ANN INT C MICR EL, P52
[18]
Dong LX, 2002, 2002 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS I-IV, PROCEEDINGS, P1477, DOI 10.1109/ROBOT.2002.1014752
[19]
ECKSTEIN R, 2000, P 8 INT C MET FORM K, P453
[20]
Micro-drilling of monocrystalline silicon using a cutting tool
[J].
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY,
2002, 26 (03)
:263-268