Laser ablation efficiency of metal samples with UV laser nanosecond pulses

被引：45

作者：

Sallé, B ^{[1
]}

Chaléard, C ^{[1
]}

Detalle, V ^{[1
]}

Lacour, JL ^{[1
]}

Mauchien, P ^{[1
]}

Nouvellon, C ^{[1
]}

Semerok, A ^{[1
]}

机构：

[1] CEA Saclay, DCC, DPE, SPCP,LSLA, F-91191 Gif Sur Yvette, France

来源：

APPLIED SURFACE SCIENCE | 1999年 / 138卷

关键词：

UV nanosecond laser ablation; ablation efficiency; metal samples;

D O I：

10.1016/S0169-4332(98)00495-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Laser ablation of pure metals by nanosecond UV pulses is studied experimentally. The influence of laser pulse number, matter properties and pulse energy on the crater sizes war investigated The experimental results obtained in the range 0.5 to 50 GW/cm(2), in air at atmospheric pressure are presented and compared with an existing model. A sufficiently good correlation was observed between melting temperature and ablation efficiency. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：302 / 305

页数：4

共 9 条

[1]

Bauerle D., 2011, LASER PROCESSING CHE, V4

[2] INFLUENCE OF THE BEAM SPOT SIZE ON ABLATION RATES IN PULSED-LASER PROCESSING [J].

EYETT, M ;

BAUERLE, D .

APPLIED PHYSICS LETTERS, 1987, 51 (24) :2054-2055

[3] Heating effects and gas-dynamic expansion of the plasma plume produced by irradiating a solid with laser pulses [J].

Guidoni, AG ;

Kelly, R ;

Mele, A ;

Miotello, A .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1997, 6 (03) :260-269

[4] KRF LASER-INDUCED ABLATION AND PATTERNING OF Y-BA-CU-O FILMS [J].

HEITZ, J ;

WANG, XZ ;

SCHWAB, P ;

BAUERLE, D ;

SCHULTZ, L .

JOURNAL OF APPLIED PHYSICS, 1990, 68 (05) :2512-2514

[5] IMPULSE COUPLING TO TARGETS IN VACUUM BY KRF, HF, AND CO2 SINGLE-PULSE LASERS [J].

PHIPPS, CR ;

TURNER, TP ;

HARRISON, RF ;

YORK, GW ;

OSBORNE, WZ ;

ANDERSON, GK ;

CORLIS, XF ;

HAYNES, LC ;

STEELE, HS ;

SPICOCHI, KC ;

KING, TR .

JOURNAL OF APPLIED PHYSICS, 1988, 64 (03) :1083-1096

[6]

Prokhorov A.M., 1990, Laser Heating of Metals

[7]

Sobol E., 1995, PHASE TRANSFORMATION

[8]

VONALLMEN M, 1987, LASER BEAM INTERACTI

[9]

WOLFFROTTKE B, 1995, APPL PHYS A-MATER, V60, P13, DOI 10.1007/BF01577606

← 1 →