MOVPE: Is there any other technology for optoelectronics?

被引:38
作者
Moon, RL
机构
[1] Solid Stt. Mat. Dept./Solid Stt. L., Hewlett-Packard Laboratories, Palo Alto, CA 94304
关键词
D O I
10.1016/S0022-0248(96)00731-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
This paper examines the role that MOVPE (metalorganic vapor phase epitaxy) plays in optoelectronics technology. Its role today accounts for similar to 15% of the grown devices. However, the technology's contribution over the industry is uneven ranging from as much as 100% in the case of solar cells and photocathodes to only a few percent in today's LED production. Total usage of MOVPE, and its usage for LEDs, are expected to increase with time to a total contribution to the industry of as much as 25% by the year 2000.
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页码:1 / 10
页数:10
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