The thickness effect of p-AlGaN blocking layer in UV-A bandpass photodetectors

被引:10
作者
Wang, CK [1 ]
Ko, TK
Chang, CS
Chang, SJ
Su, YK
Wen, TC
Kuo, CH
Chiou, YZ
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[3] Natl Cent Univ, Inst Opt Sci, Chungli 320, Taiwan
[4] So Taiwan Univ Technol, Dept Elect Engn, Tainan 710, Taiwan
关键词
AlGaN-GaN; band-pass; noise; photodetector; p-i-n;
D O I
10.1109/LPT.2005.854358
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
By means of 60-, 150-, and 300-nm-thick blocking p-Al0.1Ga0.9N layers, we have successfully achieved high performance on nitride-based p-i-n bandpass photodetectors. The peak responsivities were estimated to be 0.131, 0.129, and 0.13 A/W at 354, 357, and 356 nm for 60-, 150-, and 300-nm-thick p-Al0.1Ga0.9N blocking layer, respectively, corresponding to a quantum efficiency of around 46%. Moreover, spectral responsivity for 300-nm-thick blocking p-Al0.1Ga0.9N layer shows the narrowest bandpass characteristics from 320 to 365 nm (UV-A region). The photodetectors exhibit a 20-V break-down voltage and a small dark current of around 3 pA at 5-V reverse bias. For our 330 x 330 mu m(2) devices given bias of 0 V, the detectivity D* limited by Johnson noise are calculated to be 3.43 x 10(13), 6.77 x 10(13), and 8.22 x 10(13) cm (.) Hz(0.5)W(-1), respectively.
引用
收藏
页码:2161 / 2163
页数:3
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