100-K operation of Al-based single-electron transistors

被引:57
作者
Nakamura, Y
Chen, CD
Tsai, JS
机构
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1996年 / 35卷 / 11A期
关键词
single-electron transistor; high-temperature operation; shadow evaporation; anodization; periodic gate modulation;
D O I
10.1143/JJAP.35.L1465
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have made Al-based single-electron transistors with an artificially fabricated 20-nm island electrode by utilizing standard electron-beam lithography and three-angle shadow evaporation. A periodic gate-voltage dependence of current at above 100 K is demonstrated with this device. In addition, we increased the charging energy about 20% by using anodization.
引用
收藏
页码:L1465 / L1467
页数:3
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