High-performance chip reliability from short-time-tests - Statistical models for optical interconnect and HCI/TDDB/NBTI deep-submicron transistor failures

被引:44
作者
Haggag, A [1 ]
McMahon, W [1 ]
Hess, K [1 ]
Cheng, K [1 ]
Lee, J [1 ]
Lyding, J [1 ]
机构
[1] Univ Illinois, Dept Elect & Comp Engn, Beckman Inst, Urbana, IL 61801 USA
来源
39TH ANNUAL PROCEEDINGS: INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM 2001 | 2001年
关键词
CMOS scaling; failure statistics; probabilistic physics of failure; unimodal; bimodal Weibull distribution; activation energy distribution; single; double power law; time dependence of degradation; non Arrhenius; short time tests; deep submicron transistors; hot carrier degradation; time dependent dielectric breakdown; negative bias temperature instability; Bragg gratings; WDM optical interconnect; thermal stability;
D O I
10.1109/RELPHY.2001.922913
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In high-performance chips, both Bragg gratings (used for signal separation in multi-signal optical interconnect alternatives to copper interconnect architectures) and deep-submicron transistors fail when the stress-induced activation of the performance-enhancing hydrogen in the amorphous oxide generates enough defects to significantly degrade performance. By making an analogy to the more mature theory of Bragg gratings, disorder-induced variations in the activation (generation) energies of the defects, are shown to be a sufficient explanation for the sub-linear time dependence of HCI (hot carrier induced degradation), TDDB (time dependent dielectric [soft/hard] breakdown) and NBTI (negative bias temperature instability) deep-submicron transistor degradation modes. We then show that for all these degradation modes, Weibull (not Lognormal as is sometimes assumed) intrinsic failure-time distributions result from the variations in defect activation energies and that the short-time device degradation can be used to extract tails of these semi-symmetric Weibull failure-time distributions. This also explains why Arrhenius defect generation rates yield non-Arrhenius MTF in small devices. Combining the resulting failure statistics with novel qualification methodology, "latent failures" can be avoided through design changes implemented for reliability.
引用
收藏
页码:271 / 279
页数:9
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