共 17 条
[3]
IMPRINT OF SUB-25 NM VIAS AND TRENCHES IN POLYMERS
[J].
APPLIED PHYSICS LETTERS,
1995, 67 (21)
:3114-3116
[4]
Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination
[J].
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,
2002, 8 (4-5)
:308-313
[8]
Use of micropatterned adhesive surfaces for control of cell behavior
[J].
METHODS IN CELL-MATRIX ADHESION,
2002, 69
:385-401