Permittivity scaling in Ba1-xSrxTiO3 thin films and ceramics

被引:41
作者
Ayguen, Seymen M. [1 ]
Ihlefeld, Jon F. [2 ]
Borland, William J. [3 ]
Maria, Jon-Paul [1 ]
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] Sandia Natl Labs, Albuquerque, NM 87185 USA
[3] DuPont Elect Technol, Durham, NC 27707 USA
基金
美国能源部;
关键词
DIELECTRIC-PROPERTIES; GRAIN-SIZE; MICROSTRUCTURAL PROPERTIES; BATIO3; FILMS;
D O I
10.1063/1.3514127
中图分类号
O59 [应用物理学];
学科分类号
摘要
A dramatic enhancement in the electromechanical response of barium titanate thin films is demonstrated by understanding and optimizing the relationship between organic removal, crystallization, and microstructure, which therefore results in pore elimination, larger grain sizes, and superior densification. The combination enables one to produce bulk-like dielectric properties in a thin film with a room temperature permittivity value above 3000. This advancement in complex oxide thin film processing science creates a new perspective from which to compare, parameterize, and better understand a collection of literature data concerning the manner in which the dielectric response of BaTiO3 depends upon physical dimensions. We are consequently able to apply a single physical model to bulk ceramic and thin film systems, and so demonstrate that the existence of parasitic interfacial layers are not needed to explain dielectric scaling. This work is instrumental in illustrating that extrinsic contributions to scaling are predominant, and that a fundamental understanding of material synthesis provides important opportunities to broaden the spectrum of nonlinear electromechanical properties that can be achieved in ferroelectric thin films. (C) 2011 American Institute of Physics. [doi:10.1063/1.3514127]
引用
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页数:5
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