Hot sputtering of barium strontium titanate on nickel foils

被引:31
作者
Aygun, Seymen M. [1 ]
Daniels, Patrick [1 ]
Borland, William [2 ]
Maria, Jon-Paul [1 ]
机构
[1] N Carolina State Univ, Dept Mat Sci & Engn, Raleigh, NC 27695 USA
[2] DuPont Elect Technol, Res Triangle Pk, NC 27709 USA
关键词
D O I
10.1063/1.2909920
中图分类号
O59 [应用物理学];
学科分类号
摘要
The relationships linking temperature and voltage dependent dielectric response, grain size, and thermal budget during synthesis are illustrated. In doing so, it was found that maximizing thermal budgets within experimental bounds leads to electrical properties comparable to the best literature reports irrespective of the processing technique or microstructure. The optimal film properties include a bulk transition temperature, a room temperature permittivity of 1800, a voltage tuning ratio of 10:1 at 450 kV/cm, and a loss tangent less than 1.5% at 450 kV/cm. The sample set illustrates the well-known relationship between permittivity and crystal dimension, and the onset of a transition temperature shifts at very fine grain sizes. A brick wall model incorporating a high permittivity grain and a low permittivity grain boundary is used to interpret the dielectric data. However, the data show that high permittivity and tunability values can be achieved at grain sizes or film thicknesses that many reports associate with dramatic reductions in the dielectric response. These differences are discussed in terms of crystal quality and maximum processing temperature. The results collectively suggest that scaling effects in ferroelectric thin films are in many cases the result of low thermal budgets and the consequently high degree of structural imperfection and are not from the existence of low permittivity phases at the dielectric-electrode interface. (C) 2008 American Institute of Physics.
引用
收藏
页数:7
相关论文
共 36 条
[1]   Science and technology of high dielectric constant thin films and materials integration for application to high frequency devices [J].
Auciello, O ;
Saha, S ;
Kaufman, DY ;
Streiffer, SK ;
Fan, W ;
Kabius, B ;
Im, J ;
Baumann, P .
JOURNAL OF ELECTROCERAMICS, 2004, 12 (1-2) :119-131
[2]  
BALARAMAN D, 2005, P 55 EL COMP TECHN C, V2, P1215
[3]   Microstructural and electrical properties of (BaxSr1-x)Ti1+yO3+z thin films prepared by RF magnetron sputtering [J].
Baniecki, JD ;
Shioga, T ;
Kurihara, K .
INTEGRATED FERROELECTRICS, 2002, 46 :221-232
[4]  
Barin I., 1989, Thermochemical Data of Pure Substances
[5]   The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor deposition [J].
Basceri, C ;
Streiffer, SK ;
Kingon, AI ;
Waser, R .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (05) :2497-2504
[6]  
BORLAND WJ, 2001, CIRCUITREE MAR, P94
[7]   The size effect of Ba0.6Sr0.4TiO3 thin films on the ferroelectric properties [J].
Chen, Hongwei ;
Yang, Chuanren ;
Fu, Chunlin ;
Zhao, Li ;
Gao, Zhiqiang .
APPLIED SURFACE SCIENCE, 2006, 252 (12) :4171-4177
[8]   Smart electrodes for ultralarge-area thin film capacitors [J].
Daniels, Patrick ;
Ihlefeld, Jon ;
Borland, William ;
Maria, Jon-Paul .
JOURNAL OF MATERIALS RESEARCH, 2007, 22 (07) :1763-1766
[9]   Dielectric properties of random and ⟨100⟩ oriented SrTiO3 and (Ba,Sr)TiO3 thin films fabricated on ⟨100⟩ nickel tapes [J].
Dawley, JT ;
Clem, PG .
APPLIED PHYSICS LETTERS, 2002, 81 (16) :3028-3030
[10]   Interface-related thickness dependence of the tunability in BaSrTiO3 thin films [J].
Ellerkmann, U ;
Liedtke, R ;
Boettger, U ;
Waser, R .
APPLIED PHYSICS LETTERS, 2004, 85 (20) :4708-4710