MEMS: Micro technology, mega impact

被引：41

作者：

Nagel, DJ ^{[1
]}

Zaghloul, ME ^{[1
]}

机构：

[1] George Washington Univ, Dept Elect & Comp Engn, Washington, DC 20052 USA

来源：

IEEE CIRCUITS & DEVICES | 2001年 / 17卷 / 02期

关键词：

D O I：

10.1109/101.920875

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microelectronical systems (MEMSs) are devices with static or movable components with some dimensions on the scale of a micrometer. To date, the variety and applications of MEMS devices have increased dramatically, improving existing uses or enabling entirely new ones.

引用

页码：14 / 25

页数：12

共 16 条

[1] BISHOP D, 2001, SCI AM JAN, P88
[2] GABRIEL KJ, 1995, SCI AM, V273, P150
[3] Performance of low-loss RF MEMS capacitive switches
Goldsmith, CL
Yao, ZM
Eshelman, S
Denniston, D
[J]. IEEE MICROWAVE AND GUIDED WAVE LETTERS, 1998, 8 (08): : 269 - 271
[4] HORNBECK LJ, 1993, INT EL DEV M WASH DC
[5] Kovacs G.T., 1998, Micromachined Transducers Sourcebook
[6] Madou M., 1997, Fundamentals of Microfabrication
[7] Maluf N., 2000, INTRO MICROELECTROME
[8] MARSHALL J, 1994, 5402 NISTIR
[9] Marshall S., 2000, MICROMACHINE DEVICES, V5, P12
[10] Design of MEMS and microsystems
Nagel, DJ
[J]. DESIGN, TEST, AND MICROFABRICATION OF MEMS AND MOEMS, PTS 1 AND 2, 1999, 3680 : 20 - 29

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