In situ TEM investigation of dynamical changes of nanostructures

被引：29

作者：

Chen, L. J. ^{[1
]}

Wu, W. W. ^{[2
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

[2] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

MATERIALS SCIENCE & ENGINEERING R-REPORTS | 2010年 / 70卷 / 3-6期

关键词：

In situ TEM; Dynamical changes; Nanostructures; Epitaxial growth; Si nanorings; Si bicrystals; Silicide nanowires; Cu electromigration; Nanothermometry; QUANTUM RINGS; ATOMIC-SCALE; NANOWIRES; GROWTH; SILICON; AU; CU; ELECTROMIGRATION; DIFFUSION; NI;

D O I：

10.1016/j.mser.2010.06.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In situ investigation of the temperature induced phase transformation, structural and chemical evolution of nanocrystals is important for understanding the structure and stability of nanomaterials. Transmission electron microscopy (TEM), one of the most powerful tools for characterizing nanostructured materials, is essential for the development of nanotechnology. In situ TEM is a technique that allows a direct observation of dynamic properties in nanoscale. Recent development of ultra-high vacuum TEM (UHV-TEM) further enables the investigation on atomic-scale materials systems in a clean environment. The appropriate utilization of the UHV-TEM will be beneficial in studying the fundamental mechanisms of dynamic reactions, formation of transient phase, solid-state amorphization, epitaxial growth, growth kinetics and evolution of defects. In this paper, we present the most recent progress in observing dynamic processes in nanoscale by in situ UHV-TEM. (C) 2010 Elsevier B.V. All rights reserved.

引用

页码：303 / 319

页数：17

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