Fabrication and characterization of nano-sized SrTiO3-based oxygen sensor for near room-temperature operation

被引：11

作者：

Hu, Y ^{[1
]}

Tan, OK ^{[1
]}

Cao, WQ ^{[1
]}

Zhu, WG ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Ctr Microelect, Singapore 639798, Singapore

来源：

IEEE SENSORS JOURNAL | 2005年 / 5卷 / 05期

关键词：

annealing temperature; humidity effect; low-temperature semiconducting oxygen gas sensors; nano-sized SrTiO3;

D O I：

10.1109/JSEN.2004.841452

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Nano-sized SrTiO3-based oxygen sensors were fabricated from synthesized SrTiO3 and commercial SrTiO3 using the high-energy ball milling and the thick-film screen-printing techniques. The particle sizes, microstructural properties, oxygen-sensing properties, and humidity effects of the synthesized nano-sized SrTiO3-based oxygen sensors were characterized using X-ray diffraction (XRD), transmission electron microscope, scanning electron microscope (SEM), and gas sensing measurements. Experimental results showed that. the particle size of the powders was milled down to be around 27 nm. The effect of different annealing temperatures (400 degrees C, 500 degrees C, 600 degrees C, 700 degrees C, and 800 degrees C) on the gas sensing properties of the synthesized SrTiO3 sensor from nitrogen to 20% oxygen was characterized. The commercial SrTiO3 devices annealed at 400 degrees C, both with 0-h and 120-h milling time, were used for comparison. The optimal relative resistance (R-nitrogen/R-20% oxygen) value of 6.35 is obtained for the synthesized SrTiO3 sample annealed at 400 degrees C and operating at 40 degrees C. This operating temperature is much lower than that of conventional metal oxide semiconducting oxygen gas sensors (300 degrees C-500 degrees C) and SrTiO3 oxygen gas sensors (> 700 degrees C). The response and recovery times are 1.6 and 5 min, respectively. The detected range is 1-20% oxygen. The impedance of the synthesized SrTiO3 sensor with annealing at 400 degrees C and operating at 40 degrees C (from 1 mHz to 10 MHz) in 20% oxygen ambient was found to be independent of the relative humidity (dry, 20% RH, 80% RH, near 100% RH).

引用

页码：825 / 832

页数：8

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