Hardness and stability of metal-nitride nanoscale multilayers

被引:82
作者
Barnett, SA
Madan, A
机构
[1] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[2] Funct Coating Technol LLC, Evanston, IL 60201 USA
基金
美国国家科学基金会;
关键词
multilayers; superlattices; nitrides; nanometer; hardness; stability;
D O I
10.1016/j.scriptamat.2003.11.042
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Non-isostructural nanolayers consisting of bee metals and rocksalt-structure nitrides are discussed. The nanolayer structures are stable during high temperature annealing, owing to the metal/nitride immiscibility and low-energy coherent interfaces. Nanolayer hardness values are substantially higher than rule-of-mixtures values, and are essentially unchanged by annealing. Experimental evidence and models of nanolayer deformation mechanisms are discussed. (C) 2003 Published by Elsevier Ltd. on behalf of Acta Materialia Inc.
引用
收藏
页码:739 / 744
页数:6
相关论文
共 28 条
[1]   HALL-PETCH RELATIONS FOR MULTILAYERED MATERIALS [J].
ANDERSON, PM ;
LI, C .
NANOSTRUCTURED MATERIALS, 1995, 5 (03) :349-362
[2]  
Barnett S.A., 1993, PHYS THIN FILMS, P1
[3]   Stability of nanometer-thick layers in hard coatings [J].
Barnett, SA ;
Madan, A ;
Kim, I ;
Martin, K .
MRS BULLETIN, 2003, 28 (03) :169-172
[4]  
BARNETT SA, 1994, ANNU REV MATER SCI, V24, P481
[5]   MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS [J].
CHU, X ;
BARNETT, SA .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (09) :4403-4411
[6]   Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films [J].
Chu, X ;
Wong, MS ;
Sproul, WD ;
Barnett, SA .
JOURNAL OF MATERIALS RESEARCH, 1999, 14 (06) :2500-2507
[7]   DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS [J].
CHU, X ;
WONG, MS ;
SPROUL, WD ;
ROHDE, SL ;
BARNETT, SA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (04) :1604-1609
[8]   Interdiffusion studies of single crystal TiN/NbN superlattice thin films [J].
Engström, C ;
Birch, J ;
Hultman, L ;
Lavoie, C ;
Cabral, C ;
Jordan-Sweet, JL ;
Carlsson, JRA .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1999, 17 (05) :2920-2927
[9]   High-temperature stability of epitaxial, non-isostructural Mo/NbN superlattices [J].
Engström, C ;
Madan, A ;
Birch, J ;
Nastasi, M ;
Hultman, L ;
Barnett, SA .
JOURNAL OF MATERIALS RESEARCH, 2000, 15 (02) :554-559
[10]   Influence of modulation wavelength on the structure of TiC/W multilayers [J].
He, JL ;
Li, WZ ;
Li, HD .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (6A) :L679-L681