Dielectric properties of SrTiO3 thin films grown on various perovskite electrodes by pulsed laser deposition

被引：20

作者：

Li, HC

Si, WD

Wang, RL

Xuan, Y

Liu, BT

Xi, XX ^{[1
]}

机构：

[1] Penn State Univ, Dept Phys, University Pk, PA 16802 USA

[2] Chinese Acad Sci, Inst Phys, Natl Lab Supercond, Beijing 100080, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1998年 / 56卷 / 2-3期

基金：

美国国家科学基金会;

关键词：

dielectric constant; dielectric loss; ferroelectric thin films; pulsed laser deposition;

D O I：

10.1016/S0921-5107(98)00229-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The dielectric properties of SrTiO3 (STO) thin films deposited on LaAlO3 (LAO) substrates with various perovskite conducting layer including YBa2Cu3O7 (YBCO), SmBa2Cu3O7 (SmBCO), GdBa2Cu3O7 (GBCO) and SrRuO3 (SRO) as bottom electrode in a parallel-plate capacitor configuration were evaluated. The lattice mismatch between STO and different electrode materials varies markedly, but the dielectric constants of the STO films were not much different for different bottom electrodes. However, lower dielectric loss was observed in STO films on SRO electrodes. Under the optimum deposition conditions the tunability was large and the loss tangent was in the range of 0.001-0.01 at 1 kHz and zero bias field. (C) 1998 Elsevier Science S.A. All rights reserved.

引用

页码：218 / 222

页数：5

共 7 条

[1]

Cullity BD, 1978, ELEMENTS XRAY DIFFRA

[2] DC ELECTRIC-FIELD EFFECT ON THE MICROWAVE PROPERTIES OF YBA2CU3O7/SRTIO3 LAYERED STRUCTURES [J].