Distributed MEMS transmission lines for tunable filter applications

被引：57

作者：

Liu, Y ^{[1
]}

Borgioli, A ^{[1
]}

Nagra, AD ^{[1
]}

York, RA ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

来源：

INTERNATIONAL JOURNAL OF RF AND MICROWAVE COMPUTER-AIDED ENGINEERING | 2001年 / 11卷 / 05期

关键词：

distributed circuit; MEMS; tunable filter;

D O I：

10.1002/mmce.1034

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

This paper describes the design and fabrication of a distributed MEMS transmission line (DMTL), used to realize a transmission-line with a voltage-variable electrical length for microwave circuits. The DMTL is a coplanar waveguide periodically loaded with continuously-variable MEMS capacitors. A tunable bandpass filter was designed and fabricated on 700 mum thick glass substrates using three capacitively coupled DMTL sections as variable shunt resonators. The measured results demonstrate a 3.8% tuning range at 20 GHz with 3.6 dB minimum insertion loss. Issues for future improvement are discussed. (C) 2001 John Wiley & Sons, Inc.

引用

页码：254 / 260

页数：7

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