Optical dispersion relationships in amorphous silicon grown by molecular beam epitaxy

被引:32
作者
O'Leary, SK [1 ]
Fogal, BJ
Lockwood, DJ
Baribeau, JM
Noël, M
Zwinkels, JC
机构
[1] Univ Regina, Fac Engn, Regina, SK S4S 0A2, Canada
[2] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON K1A 0R6, Canada
[3] Natl Res Council Canada, Inst Natl Measurement Stand, Ottawa, ON K1A 0R6, Canada
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1016/S0022-3093(01)00728-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We have produced a novel form of amorphous silicon (a-Si) using ultra-high-vacuum molecular beam epitaxy (MBE). From measurements of the specular reflectance spectrum at near normal incidence and the regular transmittance spectrum at normal incidence we have determined the spectral dependence of the refractive index, the extinction coefficient, the optical absorption coefficient, and the real and complex components of the dielectric function. These optical dispersion relationships are contrasted with those corresponding to other forms of a-Si. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:57 / 63
页数:7
相关论文
共 33 条
[1]   MODEL DIELECTRIC-CONSTANTS OF SI AND GE [J].
ADACHI, S .
PHYSICAL REVIEW B, 1988, 38 (18) :12966-12976
[2]   IMPORTANCE OF ARGON PRESSURE IN THE PREPARATION OF RF-SPUTTERED AMORPHOUS SILICON-HYDROGEN ALLOYS [J].
ANDERSON, DA ;
MODDEL, G ;
PAESLER, MA ;
PAUL, W .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (03) :906-912
[3]   GROWTH AND CHARACTERIZATION OF SI-GE ATOMIC LAYER SUPERLATTICES [J].
BARIBEAU, JM ;
LOCKWOOD, DJ ;
DHARMAWARDANA, MWC ;
ROWELL, NL ;
MCCAFFREY, JP .
THIN SOLID FILMS, 1989, 183 :17-24
[4]   Hydrogen flip model for light-induced changes of amorphous silicon [J].
Biswas, R ;
Li, YP .
PHYSICAL REVIEW LETTERS, 1999, 82 (12) :2512-2515
[5]   Microscopic nature of Staebler-Wronski defect formation in amorphous silicon [J].
Biswas, R ;
Pan, BC .
APPLIED PHYSICS LETTERS, 1998, 72 (03) :371-373
[6]   Structure and hydrogen content of stable hot-wire-deposited amorphous silicon [J].
Brockhoff, AM ;
Ullersma, EHC ;
Meiling, H ;
Habraken, FHPM ;
van der Weg, WF .
APPLIED PHYSICS LETTERS, 1998, 73 (22) :3244-3246
[7]  
BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[8]   OPTICAL CHARACTERIZATION OF AMORPHOUS-SILICON HYDRIDE FILMS [J].
CODY, GD ;
WRONSKI, CR ;
ABELES, B ;
STEPHENS, RB ;
BROOKS, B .
SOLAR CELLS, 1980, 2 (03) :227-243
[9]  
CODY GD, 1984, SEMICONDUCT SEMIMET, V21, P11
[10]   DISORDER AND THE OPTICAL-ABSORPTION EDGE OF HYDROGENATED AMORPHOUS-SILICON [J].
CODY, GD ;
TIEDJE, T ;
ABELES, B ;
BROOKS, B ;
GOLDSTEIN, Y .
PHYSICAL REVIEW LETTERS, 1981, 47 (20) :1480-1483