共 33 条
[2]
IMPORTANCE OF ARGON PRESSURE IN THE PREPARATION OF RF-SPUTTERED AMORPHOUS SILICON-HYDROGEN ALLOYS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1979, 16 (03)
:906-912
[7]
BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[8]
OPTICAL CHARACTERIZATION OF AMORPHOUS-SILICON HYDRIDE FILMS
[J].
SOLAR CELLS,
1980, 2 (03)
:227-243
[9]
CODY GD, 1984, SEMICONDUCT SEMIMET, V21, P11