GROWTH AND CHARACTERIZATION OF SI-GE ATOMIC LAYER SUPERLATTICES

被引：53

作者：

BARIBEAU, JM

LOCKWOOD, DJ

DHARMAWARDANA, MWC

ROWELL, NL

MCCAFFREY, JP

机构：

来源：

THIN SOLID FILMS | 1989年 / 183卷

关键词：

D O I：

10.1016/0040-6090(89)90425-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：17 / 24

页数：8

共 10 条

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