A novel microelectromechanical tunable filter with a half symmetric cavity structure is described. The device exhibits a 3 dB linewidth of 0.27 nm, more than 70 nm tuning range under a voltage swing of 14 V and less than 0.9 dB insertion loss. The parameters of the optical cavity were tailored to efficiently couple 1550 nm light in and out of the devices using a singlemode fibre without any lenses. The structure exhibits a frequency response of 150 kHz at the 3 dB cutoff point.
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页码:1967 / 1968
页数:2
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[1]
Larson MC, 1996, APPL PHYS LETT, V68, P891, DOI 10.1063/1.116221