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Widely tunable Fabry-Perot filter using Ga(Al)As-AlOx deformable mirrors

被引：63
作者：
Tayebati, P [1 ]
Wang, PD
Vakhshoori, D
Sacks, RN
机构：
[1] CoreTek Inc, Burlington, MA 01803 USA
[2] Ohio State Univ, Dept Elect Engn, Columbus, OH 43210 USA
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1998年 / 10卷 / 03期
关键词：
D O I：
10.1109/68.661421
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A microelectromechanically tunable Fabry-Perot (FP) microinterferometer is demonstrated using Ga(AI)As-AlOx DBR micromirrors separated by an air gap. The broad-spectral response of Ga(AI)As-AlOx distributed Bragg reflector (DBR) micromirrors allows 3-dB bandwidth of the cavity to remain narrow and stable over the tuning range, Two devices with different number of mirror structures were demonstrated exhibiting linewidths of 0.5 and 2.0 nm, tuning ranges of 59 and 83 mn, respectively, In addition to a fundamental FP spatial mode, we also observe higher order spatial modes that we associate with a lensing effect caused by partially oxidized AlGaAs layers within the mirror layers.
引用
收藏
页码：394 / 396
页数：3
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