Thick, well-adhered, highly stressed tetrahedral amorphous carbon

被引:39
作者
Chhowalla, M [1 ]
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
关键词
amorphous carbon; compressive stress; applications of ta-C; interface analysis;
D O I
10.1016/S0925-9635(00)00530-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond-like carbon thin films have attractive optical, electronic and mechanical properties, which make them potentially useful for wide-ranging applications. Although a great deal of research has been conducted on the electronic properties of DLC films, their use in semiconducting applications has been limited. However, there is a growing market for the use of DLC films in mechanical applications. Non-hydrogenated tetrahedral amorphous carbon (ta-C) films deposited by cathodic are are presently widely used for machining non-ferrous materials. Thin (sub 5 nm) ta-C films are presently being considered as protective overcoats for magnetic disks and heads. However, the most prominent commercial use of a-C films has been in shaving blades. In this paper, the challenges and solutions for the commercial development of ta-C films for mechanical applications are described. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1011 / 1016
页数:6
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