High-speed GaAs-based resonant-cavity-enhanced 1.3 μm photodetector

被引:28
作者
Kimukin, I [1 ]
Ozbay, E
Biyikli, N
Kartaloglu, T
Aytür, O
Unlu, S
Tuttle, G
机构
[1] Bilkent Univ, Dept Phys, TR-06533 Ankara, Turkey
[2] Bilkent Univ, Dept Elect & Elect Engn, TR-06533 Ankara, Turkey
[3] Boston Univ, Dept Elect & Comp Engn, Boston, MA 02215 USA
[4] Iowa State Univ, Microelect Res Ctr, Ames, IA 50011 USA
关键词
D O I
10.1063/1.1329628
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report GaAs-based high-speed, resonant-cavity-enhanced, Schottky barrier internal photoemission photodiodes operating at 1.3 mum. The devices were fabricated by using a microwave-compatible fabrication process. Resonance of the cavity was tuned to 1.3 mum and a nine-fold enhancement was achieved in quantum efficiency. The photodiode had an experimental setup limited temporal response of 16 ps, corresponding to a 3 dB bandwidth of 20 GHz. (C) 2000 American Institute of Physics. [S0003-6951(00)00149-2].
引用
收藏
页码:3890 / 3892
页数:3
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