Neutral pumping in a helicon discharge

被引：76

作者：

Gilland, J ^{[1
]}

Breun, R ^{[1
]}

Hershkowitz, N ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Engn Phys, Madison, WI 53706 USA

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1998年 / 7卷 / 03期

关键词：

D O I：

10.1088/0963-0252/7/3/020

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

At powers of 500-800 W of 13.56 MHz rf power in a 1 kG axial magnetic field, the neutral pressure in the bulk of a helicon discharge with electron densities of similar to 10(13) cm(-3) and electron temperatures of similar to 3 eV in argon decreased by a factor of ten compared to the pressure before the discharge. These experimental results are compared with a simple axial diffusion model of ionization and neutral transport and agree qualitatively with calculated axial profiles of neutral pressure. The effects of cusped fields on neutral density profiles and plasma confinement are also examined.

引用

页码：416 / 422

页数：7

共 16 条

[1]

BOSWELL RW, 1984, PLASMA PHYS CONTR F, V26, P1147, DOI 10.1088/0741-3335/26/10/001

[2]

BOSWELL RW, 1987, APPL PHYS LETT, V50

[3]

CAMPBELL GA, 1992, SPIE, V1803, P226

[4] EXPERIMENTS ON HELICON PLASMA SOURCES [J].