Adsorption of water on Si(100)-(2x1): A study with density functional theory

被引:180
作者
Konecny, R
Doren, DJ
机构
[1] Dept. of Chemistry and Biochemistry, University of Delaware, Newark
关键词
D O I
10.1063/1.473346
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Adsorption of water on the Si(100)-(2x1) surface has been investigated using density functional theory and cluster models of the surface. The reaction pathway and geometries of the product, the transition state and a molecular precursor state are described. There is no energy barrier to dissociative chemisorption. Adsorbed H and OH fragments are most stable when bonded to the same surface dimer with the hydroxyl oriented away from the surface dimer bond. The orbital and electrostatic interactions that determine the adsorbate and transition state geometries are analyzed. Surface distortion (dimer buckling) is a recurring theme in this analysis. Interactions of adsorbed molecular fragments with each other and with dangling bonds have significant effects, modifying the adsorbate geometry and leading to adsorbate islanding. Calculated vibrational frequencies of adsorbed H2O on Si(100)-(2x1) are discussed. The theoretical results are consistent with most available experimental results, and provide a microscopic description of the interactions that account for the observations. (C) 1997 American Institute of Physics.
引用
收藏
页码:2426 / 2435
页数:10
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共 63 条
[61]   A COMPARATIVE-STUDY OF THE INITIAL OXYGEN AND WATER REACTIONS ON GERMANIUM AND SILICON USING SIMS [J].
WEE, ATS ;
HUAN, CHA ;
THONG, PSP ;
TAN, KL .
CORROSION SCIENCE, 1994, 36 (01) :9-22
[62]   DIRECT OBSERVATION OF AN INCREASE IN BUCKLED DIMERS ON SI(001) AT LOW-TEMPERATURE [J].
WOLKOW, RA .
PHYSICAL REVIEW LETTERS, 1992, 68 (17) :2636-2639
[63]   ADSORPTION AND DECOMPOSITION OF WATER ON SI(100) - A TPD AND SSIMS STUDY [J].
ZHOU, XL ;
FLORES, CR ;
WHITE, JM .
APPLIED SURFACE SCIENCE, 1992, 62 (04) :223-237