Fabrication of controllable free-standing ultrathin porous alumina membranes

被引:96
作者
Ding, GQ [1 ]
Zheng, MJ [1 ]
Xu, WL [1 ]
Shen, WZ [1 ]
机构
[1] Shanghai Jiao Tong Univ, Dept Phys, Lab Condedsed Matter Spect & Optoelect Phys, Shanghai 200030, Peoples R China
关键词
D O I
10.1088/0957-4484/16/8/050
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We present detailed information on the fabrication of free-standing ultrathin porous alumina membranes (PAMs) with controllable thickness of 100-1000 nm. The mechanism of the ultrathin PAM formation has been revealed by a combination study of current-time characteristics and microstructure images. At the beginning of the anodization, V-shape nanopores can be observed due to the alumina formation in both the sidewalls and the barrier layers. As a result of the applied electric field effect, part of the alumina in the sidewalls is dissolved, the nanopores gradually become regularly U-shape and finally grow steadily. Ultrathin PAMs with controllable thickness and morphology have been realized by changing the anodization time and the current density. Furthermore, an improved method has been demonstrated to obtain free-standing ultrathin PAMs by removing unoxided aluminium through a nontoxic mixture solution of saturated CuSO4 and HCl.
引用
收藏
页码:1285 / 1289
页数:5
相关论文
共 25 条
[1]   Periodic array of uniform ZnO nanorods by second-order self-assembly [J].
Chik, H ;
Liang, J ;
Cloutier, SG ;
Kouklin, N ;
Xu, JM .
APPLIED PHYSICS LETTERS, 2004, 84 (17) :3376-3378
[2]   Nanometric superlattices: non-lithographic fabrication, materials, and prospects [J].
Chik, H ;
Xu, JM .
MATERIALS SCIENCE & ENGINEERING R-REPORTS, 2004, 43 (04) :103-138
[3]   Aligned carbon nanotubes for nanoelectronics [J].
Choi, WB ;
Bae, E ;
Kang, D ;
Chae, S ;
Cheong, BH ;
Ko, JH ;
Lee, EM ;
Park, W .
NANOTECHNOLOGY, 2004, 15 (10) :S512-S516
[4]   Self-ordered pore structure of anodized aluminum on silicon and pattern transfer [J].
Crouse, D ;
Lo, YH ;
Miller, AE ;
Crouse, M .
APPLIED PHYSICS LETTERS, 2000, 76 (01) :49-51
[5]  
DING GQ, 2005, UNPUB
[6]   Fabrication of nanoring arrays by sputter redeposition using porous alumina templates [J].
Hobbs, KL ;
Larson, PR ;
Lian, GD ;
Keay, JC ;
Johnson, MB .
NANO LETTERS, 2004, 4 (01) :167-171
[7]   Synthesis of silicon nanotubes on porous alumina using molecular beam epitaxy [J].
Jeong, SY ;
Kim, JY ;
Yang, HD ;
Yoon, BN ;
Choi, SH ;
Kang, HK ;
Yang, CW ;
Lee, YH .
ADVANCED MATERIALS, 2003, 15 (14) :1172-+
[8]   Self-organized formation of hexagonal pore arrays in anodic alumina [J].
Jessensky, O ;
Muller, F ;
Gosele, U .
APPLIED PHYSICS LETTERS, 1998, 72 (10) :1173-1175
[9]   Nanoelectronics - Growing Y-junction carbon nanotubes [J].
Li, J ;
Papadopoulos, C ;
Xu, J .
NATURE, 1999, 402 (6759) :253-254
[10]   Nonlithographic fabrication of lateral superlattices for nanometric electromagnetic-optic applications [J].
Liang, JY ;
Chik, H ;
Xu, J .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2002, 8 (05) :998-1008