Structural modifications in He-implanted waveguide layers of LiNbO3

被引:34
作者
Avrahami, Y [1 ]
Zolotoyabko, E [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,DEPT MAT ENGN,IL-32000 HAIFA,ISRAEL
关键词
D O I
10.1016/S0168-583X(96)00484-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
He-implanted and heat-treated optical waveguide layers in Y-cut LiNbO3 wafers were studied by means of high-resolution X-ray diffraction. The depth-resolved profiles of the lattice parameter were derived from the measured diffraction spectra as a function of annealing temperature. Using these data, the spatial distribution of the electron density related to the post-implantation lattice swelling was determined, which shed light on the waveguide formation in damaged layers. Heat treatments at temperatures T > 200 degrees C resulted in the deterioration of waveguide properties due to annealing of the implantation-induced damage. Lattice recovery was found to be a thermally activated process with an activation energy of E(a) = 0.32 +/- 0.03 eV. This is accompanied by defect clustering, giving rise to diffuse scattering components in the diffraction spectra.
引用
收藏
页码:84 / 87
页数:4
相关论文
共 13 条
[1]  
[Anonymous], XRAY NEUTRON DIFFRAC
[2]   X-RAY-DIFFRACTION OF MULTILAYERS AND SUPERLATTICES [J].
BARTELS, WJ ;
HORNSTRA, J ;
LOBEEK, DJW .
ACTA CRYSTALLOGRAPHICA SECTION A, 1986, 42 :539-545
[3]   X-RAY-DIFFRACTION FROM LOW-DIMENSIONAL STRUCTURES [J].
FEWSTER, PF .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1993, 8 (11) :1915-1934
[4]   X-RAY DETERMINATION OF THE DISLOCATION DENSITIES IN SEMICONDUCTOR CRYSTALS USING A BARTELS 5-CRYSTAL DIFFRACTOMETER [J].
HEALEY, PD ;
BAO, K ;
GOKHALE, M ;
AYERS, JE ;
JAIN, FC .
ACTA CRYSTALLOGRAPHICA SECTION A, 1995, 51 :498-503
[5]   OPTICAL WAVEGUIDING LAYERS IN LINBO3 AND LITAO3 [J].
KAMINOW, IP ;
CARRUTHERS, JR .
APPLIED PHYSICS LETTERS, 1973, 22 (07) :326-328
[6]  
Nishihara H., 1989, OPTICAL INTEGRATED C
[7]   METAL-DIFFUSED OPTICAL-WAVEGUIDES IN LINBO3 [J].
SCHMIDT, RV ;
KAMINOW, IP .
APPLIED PHYSICS LETTERS, 1974, 25 (08) :458-460
[8]   OPTICAL EFFECTS OF ION-IMPLANTATION [J].
TOWNSEND, PD .
REPORTS ON PROGRESS IN PHYSICS, 1987, 50 (05) :501-558
[9]  
Warren B. E., 1969, X-Ray Diffraction
[10]  
WIE CR, 1994, MAT SCI ENG R, V13, P1, DOI 10.1016/0927-796X(94)90008-6