Laser-chemical processing: Recent developments

被引：12

作者：

Bauerle, D

机构：

[1] Angewandte Physik, Johannes-Kepler-Univ. Linz

来源：

APPLIED SURFACE SCIENCE | 1996年 / 106卷

关键词：

D O I：

10.1016/S0169-4332(96)00368-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Recent developments in laser-chemical processing are reviewed with special emphasis on micropatterning, various types of surface modifications, and the fabrication of thin films by pulsed-laser deposition (PLD). The role of instabilities is also discussed.

引用

收藏

页码：1 / 10

页数：10

相关论文

共 56 条

[1] LASER-INDUCED SURFACE MODIFICATION AND STRUCTURE FORMATION OF POLYMERS [J].

ARENHOLZ, E ;

HEITZ, J ;

WAGNER, M ;

BAUERLE, D ;

HIBST, H ;

HAGEMEYER, A .

APPLIED SURFACE SCIENCE, 1993, 69 (1-4) :16-19

[2] STRUCTURE FORMATION IN UV-LASER-ABLATED POLYIMIDE FOILS [J].

ARENHOLZ, E ;

WAGNER, M ;

HEITZ, J ;

BAUERLE, D .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1992, 55 (01) :119-120

[3] SIMULATION OF GROWTH IN PYROLYTIC LASER-CVD OF MICROSTRUCTURES .1. ONE-DIMENSIONAL APPROACH [J].

ARNOLD, N ;

KULLMER, R ;

BAUERLE, D .

MICROELECTRONIC ENGINEERING, 1993, 20 (1-2) :31-41

[4] LASER DIRECT WRITING AND INSTABILITIES - A ONE-DIMENSIONAL APPROACH [J].

ARNOLD, N ;

KARGL, PB ;

BAUERLE, D .

APPLIED SURFACE SCIENCE, 1995, 86 (1-4) :457-465

[5]

Bachmann F., 1989, Chemtronics, V4, P149

[6] CHEMICAL-PROCESSING WITH LASERS - RECENT DEVELOPMENTS [J].

BAUERLE, D .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1988, 46 (03) :261-270

[7]

BAUERLE D, 1986, SPRINGER SERIES MATE, V1

[8]

BAUERLE D, 1996, P SPIE SAN JOSE CA, V2403

[9]

BAUM TH, 1991, SPIE P, V1598, P122

[10] LASER-ABLATION AND THE PRODUCTION OF POLYMER-FILMS [J].

BLANCHET, GB ;

FINCHER, CR ;

JACKSON, CL ;

SHAH, SI ;

GARDNER, KH .

SCIENCE, 1993, 262 (5134) :719-721

← 1 2 3 4 5 6 →