Laser-chemical processing: Recent developments

被引：12

作者：

Bauerle, D

机构：

[1] Angewandte Physik, Johannes-Kepler-Univ. Linz

来源：

APPLIED SURFACE SCIENCE | 1996年 / 106卷

关键词：

D O I：

10.1016/S0169-4332(96)00368-6

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Recent developments in laser-chemical processing are reviewed with special emphasis on micropatterning, various types of surface modifications, and the fabrication of thin films by pulsed-laser deposition (PLD). The role of instabilities is also discussed.

引用

页码：1 / 10

页数：10

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