LASER DIRECT WRITING AND INSTABILITIES - A ONE-DIMENSIONAL APPROACH

被引:7
作者
ARNOLD, N
KARGL, PB
BAUERLE, D
机构
[1] Angewandte Physik, Johannes-Kepler-Universität
关键词
D O I
10.1016/0169-4332(94)00450-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Laser direct writing of thermally well-conducting deposits on thermal insulators is described on the basis of a one-dimensional model. Different types of instabilities are discussed. The theoretical results are compared with experimental observations.
引用
收藏
页码:457 / 465
页数:9
相关论文
共 11 条
[1]   SIMULATION OF GROWTH IN PYROLYTIC LASER-CVD OF MICROSTRUCTURES .1. ONE-DIMENSIONAL APPROACH [J].
ARNOLD, N ;
KULLMER, R ;
BAUERLE, D .
MICROELECTRONIC ENGINEERING, 1993, 20 (1-2) :31-41
[2]  
BAUERLE D, 1986, SPRINGER SERIES MATE, V1
[3]   BISTABLE GROWTH IN LASER-CHEMICAL VAPOR-DEPOSITION [J].
KARGL, PB ;
KULLMER, R ;
BAUERLE, D .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 57 (06) :577-578
[4]   PERIODIC STRUCTURES IN PYROLYTIC LASER-CVD OF W FROM WCL6 [J].
KARGL, PB ;
KULLMER, R ;
BAUERLE, D .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 57 (02) :175-179
[5]  
KARGL PB, IN PRESS
[6]   LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF NI BY DECOMPOSITION OF NI(CO)4 [J].
KRAUTER, W ;
BAUERLE, D ;
FIMBERGER, F .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 31 (01) :13-18
[7]   LASER-INDUCED DEPOSITION OF TUNGSTEN FROM TUNGSTEN HEXACHLORIDE [J].
KULLMER, R ;
KARGL, P ;
BAUERLE, D .
THIN SOLID FILMS, 1992, 218 (1-2) :122-136
[8]   TEMPERATURE RISE INDUCED BY A LASER-BEAM .2. NON-LINEAR CASE [J].
LAX, M .
APPLIED PHYSICS LETTERS, 1978, 33 (08) :786-788
[9]   MULTIPLICITIES AND PERIODIC BEHAVIOR IN LASER DIRECT-WRITE METALLIZATION [J].
PRICE, PE ;
JENSEN, KF .
CHEMICAL ENGINEERING SCIENCE, 1989, 44 (09) :1879-1891
[10]   LCVD OF TUNGSTEN MICROSTRUCTURES ON QUARTZ [J].
TOTH, Z ;
KARGL, P ;
GRIVAS, C ;
PIGLMAYER, K ;
SZORENYI, T ;
BAUERLE, D .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1992, 54 (03) :189-192