Drawing fine patterns with cross-linkable polymer Langmuir-Blodgett film

被引：23

作者：

Aoki, A ^{[1
]}

Nakaya, M ^{[1
]}

Miyashita, T ^{[1
]}

机构：

[1] TOHOKU UNIV, INST CHEM REACT SCI, AOBA KU, SENDAI, MIYAGI 98077, JAPAN

来源：

CHEMISTRY LETTERS | 1996年 / 08期

关键词：

D O I：

10.1246/cl.1996.667

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Langmuir-Blodgett (LB) films of copolymer (1) consisting of N-dodecylacrylamide (DDA), and cross-linkable group, N-omega-acryloylundecyl-4-vinylpyridinium salt has been prepared. On UV irradiation, the cross-linking reaction occurs efficiently giving uniform two dimensional cross-linked polymer LB films with a high stability against solvents. The photolithographic property of the LB film are applicable to a new type of high resolution negative photoresists.

引用

页码：667 / 668

页数：2

共 13 条

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