CHARACTERIZATION OF AN N-OCTADECYLACRYLAMIDE LANGMUIR BLODGETT FILM FOR APPLICATION AS AN ELECTRON-BEAM RESIST

被引：26

作者：

MIYASHITA, T ^{[1
]}

MATSUDA, M ^{[1
]}

机构：

[1] TOHOKU UNIV,CHEM RES INST NONAQUEOUS SOLUT,SENDAI,MIYAGI 980,JAPAN

来源：

THIN SOLID FILMS | 1989年 / 168卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90025-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L47 / L49

页数：3

共 12 条

[1] POLYMERIZED MONO-MOLECULAR LAYERS - A NEW CLASS OF ULTRATHIN RESINS FOR MICROLITHOGRAPHY [J].

BARRAUD, A ;

ROSILIO, C ;

RUAUDELTEIXIER, A .

THIN SOLID FILMS, 1980, 68 (01) :91-98

[2] SOLID-STATE ELECTRON-INDUCED POLYMERIZATION OF OMEGA-TRICOSENOIC ACID MULTILAYERS [J].

BARRAUD, A ;

ROSILIO, C ;

RUAUDELTEIXIER, A .

JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1977, 62 (03) :509-523

[3] POLYMERIZATION IN LANGMUIR-BLODGETT FILMS AND RESIST APPLICATIONS [J].

BARRAUD, A .

THIN SOLID FILMS, 1983, 99 (1-3) :317-321

[4] RECENT IMPROVEMENTS IN MONO-MOLECULAR RESISTS [J].

BARRAUD, A ;

ROSILIO, C ;

RUAUDELTEIXIER, A .

THIN SOLID FILMS, 1980, 68 (01) :99-100

[5] Built-up films of barium stearate and their optical properties [J].

Blodgett, KB ;

Langmuir, I .

PHYSICAL REVIEW, 1937, 51 (11) :0964-0982

[6]

BOWDEN MJ, 1981, SOLID STATE TECHNOL, V24, P73

[7] RAPID WRITING OF FINE LINES IN LANGMUIR-BLODGETT FILMS USING ELECTRON-BEAMS [J].

BROERS, AN ;

POMERANTZ, M .

THIN SOLID FILMS, 1983, 99 (1-3) :323-329

[8] ELECTRON-BEAM RESISTS PRODUCED FROM MONOMER-POLYMER LANGMUIR-BLODGETT FILMS [J].

FARISS, G ;

LANDO, J ;

RICKERT, S .

THIN SOLID FILMS, 1983, 99 (1-3) :305-315

[9] DRAWING FINE PATTERNS ON N-OCTADECYLACRYLAMIDE LANGMUIR-BLODGETT MULTILAYERS - A NEW CLASS OF ULTRATHIN RESISTS [J].

MIYASHITA, T ;

YOSHIDA, H ;

MATSUDA, M .

THIN SOLID FILMS, 1987, 155 (02) :L11-L14

[10] POLYMERIZATION OF N-OCTADECYLACRYLAMIDE IN LANGMUIR-BLODGETT MULTILAYERS [J].

MIYASHITA, T ;

YOSHIDA, H ;

MURAKATA, T ;

MATSUDA, M .

POLYMER, 1987, 28 (02) :311-314

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