Femtosecond two-photon stereo-lithography

被引：120

作者：

Miwa, M ^{[1
]}

Juodkazis, S ^{[1
]}

Kawakami, T ^{[1
]}

Matsuo, S ^{[1
]}

Misawa, H ^{[1
]}

机构：

[1] Univ Tokushima, Fac Engn, Tokushima 7708506, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 73卷 / 05期

关键词：

D O I：

10.1007/s003390100934

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report herein a method for the three-dimensional (3D) fabrication of microstructures by means of direct fs-beam writing (scanning) inside a polymerizable resin. Photopolymerization takes place via two-photon absorption (TPA), as indicated by measurements of transmission power dependence. This concept of fabrication is based on two principles: the use of short, sub-picosecond pulses and simultaneous tight focusing (numerical aperture. NA > 1), This approach creates a unique opportunity for avoiding self-focusing even at very high intensities, as the power is lower than the self-focusing threshold. Under such conditions, no filament formation takes place and no thermal convection disturbance occurs in the focal vicinity during photo-polymerization. This technique requires no sacrificial layers or structures in real 3D micro-stereo-lithography.

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收藏

页码：561 / 566

页数：6

相关论文

共 29 条

[1]

ACHMANOV SA, 1988, OPTICS FEMTOSECOND P

[2] Design of organic molecules with large two-photon absorption cross sections [J].

Albota, M ;

Beljonne, D ;

Brédas, JL ;

Ehrlich, JE ;

Fu, JY ;

Heikal, AA ;

Hess, SE ;

Kogej, T ;

Levin, MD ;

Marder, SR ;

McCord-Maughon, D ;

Perry, JW ;

Röckel, H ;

Rumi, M ;

Subramaniam, C ;

Webb, WW ;

Wu, XL ;

Xu, C .

SCIENCE, 1998, 281 (5383) :1653-1656

[3]

Barber P. W., 1990, LIGHT SCATTERING PAR, V2

[4] 3D microfabrication by combining microstereolithography and thick resist UV lithography [J].

Bertsch, A ;

Lorenz, H ;

Renaud, P .

SENSORS AND ACTUATORS A-PHYSICAL, 1999, 73 (1-2) :14-23

[5] Nonlinear multiphoton processes in organic and polymeric materials [J].

Bhawalkar, JD ;

He, GS ;

Prasad, PN .

REPORTS ON PROGRESS IN PHYSICS, 1996, 59 (09) :1041-1070

[6] EMPIRICAL RELATIONSHIPS FOR PREDICTING NON-LINEAR REFRACTIVE-INDEX CHANGES IN OPTICAL SOLIDS [J].

BOLING, NL ;

GLASS, AJ ;

OWYOUNG, A .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1978, 14 (08) :601-608

[7] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[8] Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].

Cumpston, BH ;

Ananthavel, SP ;

Barlow, S ;

Dyer, DL ;

Ehrlich, JE ;

Erskine, LL ;

Heikal, AA ;

Kuebler, SM ;

Lee, IYS ;

McCord-Maughon, D ;

Qin, JQ ;

Röckel, H ;

Rumi, M ;

Wu, XL ;

Marder, SR ;

Perry, JW .

NATURE, 1999, 398 (6722) :51-54

[9] Three-dimensional microstructures created by laser microfabrication technology [J].

Horiyama, M ;

Sun, HB ;

Miwa, M ;

Matsuo, S ;

Misawa, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (2B) :L212-L215

[10] Three-dimensional microfabrication with two-photon-absorbed photopolymerization [J].

Maruo, S ;

Nakamura, O ;

Kawata, S .

OPTICS LETTERS, 1997, 22 (02) :132-134