Femtosecond two-photon stereo-lithography

被引：120

作者：

Miwa, M ^{[1
]}

Juodkazis, S ^{[1
]}

Kawakami, T ^{[1
]}

Matsuo, S ^{[1
]}

Misawa, H ^{[1
]}

机构：

[1] Univ Tokushima, Fac Engn, Tokushima 7708506, Japan

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2001年 / 73卷 / 05期

关键词：

D O I：

10.1007/s003390100934

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report herein a method for the three-dimensional (3D) fabrication of microstructures by means of direct fs-beam writing (scanning) inside a polymerizable resin. Photopolymerization takes place via two-photon absorption (TPA), as indicated by measurements of transmission power dependence. This concept of fabrication is based on two principles: the use of short, sub-picosecond pulses and simultaneous tight focusing (numerical aperture. NA > 1), This approach creates a unique opportunity for avoiding self-focusing even at very high intensities, as the power is lower than the self-focusing threshold. Under such conditions, no filament formation takes place and no thermal convection disturbance occurs in the focal vicinity during photo-polymerization. This technique requires no sacrificial layers or structures in real 3D micro-stereo-lithography.

引用

收藏

页码：561 / 566

页数：6

相关论文

共 29 条

[11] Three-dimensional microfabrication by use of single-photon-absorbed polymerization [J].

Maruo, S ;

Ikuta, K .

APPLIED PHYSICS LETTERS, 2000, 76 (19) :2656-2658

[12] Microfabrication by femtosecond laser irradiation [J].

Misawa, H ;

Sun, HB ;

Juodkazis, S ;

Watanabe, M ;

Matsuo, S .

LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING V, 2000, 3933 :246-260

[13] Manufacturing of three-dimensional micro-parts by UV laser induced polymerization [J].

Nakamoto, T ;

Yamaguchi, K ;

Abraha, PA ;

Mishima, K .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (02) :240-253

[14] A comparison of rapid prototyping technologies [J].

Pham, DT ;

Gault, RS .

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 1998, 38 (10-11) :1257-1287

[15] Optically-induced growth of fiber patterns into a photopolymerizable resin [J].

Shoji, S ;

Kawata, S .

APPLIED PHYSICS LETTERS, 1999, 75 (05) :737-739

[16] Photofabrication of three-dimensional photonic crystals by multibeam laser interference into a photopolymerizable resin [J].

Shoji, S ;

Kawata, S .

APPLIED PHYSICS LETTERS, 2000, 76 (19) :2668-2670

[17] Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption [J].

Sun, HB ;

Kawakami, T ;

Xu, Y ;

Ye, JY ;

Matuso, S ;

Misawa, H ;

Miwa, M ;

Kaneko, R .

OPTICS LETTERS, 2000, 25 (15) :1110-1112

[18] Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin [J].

Sun, HB ;

Matsuo, S ;

Misawa, H .

APPLIED PHYSICS LETTERS, 1999, 74 (06) :786-788

[19] Arbitrary-lattice photonic crystals created by multiphoton microfabrication [J].

Sun, HB ;

Xu, Y ;

Juodkazis, S ;

Sun, K ;

Watanabe, M ;

Matsuo, S ;

Misawa, H ;

Nishii, J .

OPTICS LETTERS, 2001, 26 (06) :325-327

[20] Microprocessing at the fingertips [J].

Thornell, G ;

Johansson, S .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1998, 8 (04) :251-262