Real three-dimensional microstructures fabricated by photopolymerization of resins through two-photon absorption

被引:140
作者
Sun, HB
Kawakami, T
Xu, Y
Ye, JY
Matuso, S
Misawa, H
Miwa, M
Kaneko, R
机构
[1] Univ Tokushima, Satellite Venture Business Lab, Tokushima 7708506, Japan
[2] Univ Tokushima, Grad Sch Engn, Dept Ecosyst Engn, Tokushima 7708506, Japan
[3] Wakayama Univ, Fac Syst Engn, Dept Optmechatron, Wakayama 6408510, Japan
关键词
D O I
10.1364/OL.25.001110
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Effective energy windows for two-photon absorption (TPA) photopolymerization of resins were investigated and, with a properly selected laser pulse energy, exquisite three-dimensional (3D) microstructures with submicrometer spatial resolution were achieved. The results show the inherent utility of TPA in the fabrication of real 3D patterns. In particular, we propose and utilize a resin pre-exposure technique by which freely movable components affixed to an axle are built, demonstrating a new application of TPA in laser microfabrication. (C) 2000 Optical Society of America OCIS codes: 220.3740, 220.4000, 230.4000, 160.4330, 190.4180, 160.5470.
引用
收藏
页码:1110 / 1112
页数:3
相关论文
共 11 条
[1]   Design of organic molecules with large two-photon absorption cross sections [J].
Albota, M ;
Beljonne, D ;
Brédas, JL ;
Ehrlich, JE ;
Fu, JY ;
Heikal, AA ;
Hess, SE ;
Kogej, T ;
Levin, MD ;
Marder, SR ;
McCord-Maughon, D ;
Perry, JW ;
Röckel, H ;
Rumi, M ;
Subramaniam, C ;
Webb, WW ;
Wu, XL ;
Xu, C .
SCIENCE, 1998, 281 (5383) :1653-1656
[2]   Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].
Cumpston, BH ;
Ananthavel, SP ;
Barlow, S ;
Dyer, DL ;
Ehrlich, JE ;
Erskine, LL ;
Heikal, AA ;
Kuebler, SM ;
Lee, IYS ;
McCord-Maughon, D ;
Qin, JQ ;
Röckel, H ;
Rumi, M ;
Wu, XL ;
Marder, SR ;
Perry, JW .
NATURE, 1999, 398 (6722) :51-54
[3]   2-PHOTON LASER SCANNING FLUORESCENCE MICROSCOPY [J].
DENK, W ;
STRICKLER, JH ;
WEBB, WW .
SCIENCE, 1990, 248 (4951) :73-76
[4]   Biochemical IC chip toward cell free DNA protein synthesis [J].
Ikuta, K ;
Maruo, S ;
Fukaya, Y ;
Fujisawa, T .
MICRO ELECTRO MECHANICAL SYSTEMS - IEEE ELEVENTH ANNUAL INTERNATIONAL WORKSHOP PROCEEDINGS, 1998, :131-136
[5]   Two-photon-absorbed photopolymerization for three-dimensional microfabrication [J].
Maruo, S ;
Kawata, S .
MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, :169-174
[6]   Three-dimensional microfabrication with two-photon-absorbed photopolymerization [J].
Maruo, S ;
Nakamura, O ;
Kawata, S .
OPTICS LETTERS, 1997, 22 (02) :132-134
[7]   Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication [J].
Maruo, S ;
Kawata, S .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (04) :411-415
[8]  
Shen Y. R., 2002, PRINCIPLES NONLINEAR
[9]   Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin [J].
Sun, HB ;
Matsuo, S ;
Misawa, H .
APPLIED PHYSICS LETTERS, 1999, 74 (06) :786-788
[10]   Single-shot two-photon exposure of commercial photoresist for the production of three-dimensional structures [J].
Witzgall, G ;
Vrijen, R ;
Yablonovitch, E ;
Doan, V ;
Schwartz, BJ .
OPTICS LETTERS, 1998, 23 (22) :1745-1747