Deformation of amorphous silicon nanostructures subjected to monotonic and cyclic loading

被引：11

作者：

Gaire, C. ^{[2
]}

Ye, D-X. ^{[2
]}

Lu, T-M. ^{[2
]}

Wang, G-C. ^{[2
]}

Picu, R. C. ^{[1
]}

机构：

[1] Rensselaer Polytech Inst, Dept Mech Aerosp & Nucl Engn, Troy, NY 12180 USA

[2] Rensselaer Polytech Inst, Dept Phys Appl Phys & Astron, Troy, NY 12180 USA

来源：

JOURNAL OF MATERIALS RESEARCH | 2008年 / 23卷 / 02期

关键词：

D O I：

10.1557/JMR.2008.0061

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An atomic force microscope (AFM) was used to characterize the deformation behavior of amorphous Si (a-Si) nanostructures subjected to monotonic and cyclic loading. The sample geometry was specially designed (in the form of elbow) using finite element modeling for the purpose of these tests, and the samples were grown by glancing angle deposition. When deformed monotonically at room temperature, the a-Si specimens exhibited a nonlinear force-displacement response at forces larger than a critical force, a phenomenon not observed in bulk silicon. A fatigue testing methodology based on the use of the AFM was established. The fatigue life of the a-Si specimens was observed to increase by five orders of magnitude with a 50% reduction in the applied force amplitude. It was verified that this delayed failure is caused by progressive damage accumulation during cyclic loading. These results are compared with literature data obtained from micron-size specimens.

引用

页码：328 / 335

页数：8

共 30 条

[1] Mechanisms for fatigue of micron-scale silicon structural films [J].

Alsem, Daan Hein ;

Pierron, Olivier N. ;

Stach, Eric A. ;

Muhlstein, Christopher L. ;

Ritchie, Robert O. .

ADVANCED ENGINEERING MATERIALS, 2007, 9 (1-2) :15-30

[2] Tensile-mode fatigue testing of silicon films as structural materials for MEMS [J].

Ando, T ;

Shikida, M ;

Sato, K .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 93 (01) :70-75

[3] THE FRACTURE OF SINGLE-CRYSTAL SILICON UNDER SEVERAL LIQUID ENVIRONMENTS [J].

CHEN, TJ ;

KNAPP, WJ .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1980, 63 (3-4) :225-226

[4] MICROMECHANICAL FATIGUE TESTING [J].

CONNALLY, JA ;

BROWN, SB .

EXPERIMENTAL MECHANICS, 1993, 33 (02) :81-90

[5] High-density liquidlike component facilitates plastic flow in a model amorphous silicon system [J].

Demkowicz, MJ ;

Argon, AS .

PHYSICAL REVIEW LETTERS, 2004, 93 (02) :025505-1

[6]

Freund L.B., 2003, THIN FILM MAT, P96

[7] Mechanical testing of isolated amorphous silicon slanted nanorods [J].

Gaire, C ;

Ye, DX ;

Tang, F ;

Picu, RC ;

Wang, GC ;

Lu, TM .

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2005, 5 (11) :1893-1897

[8] Mechanisms of cyclic fatigue-crack propagation in a fine-grained alumina ceramic: The role of crack closure [J].

Gilbert, CJ ;

Ritchie, RO .

FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, 1997, 20 (10) :1453-1466

[9]

Green JA, 2006, ARTHRITIS RHEUM-US, V54, P1705, DOI [10.1002/art.21799, 10.1016/j.actamat.2005.12.004]

[10]

HAYES TA, 1998, PROPERTIES AMORPHOUS, P359

← 1 2 3 →