Pyrolytic LCVD of fibers: A theoretical description

被引：12

作者：

Arnold, N

Thor, E

Kirichenko, N

Bauerle, D

机构：

[1] Angewandte Physik, Johannes-Kepler-Univ., Linz, A-4040, Linz

[2] General Physics Institute, Academy of Sciences

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1996年 / 62卷 / 06期

关键词：

D O I：

10.1007/BF01571683

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The pyrolytic LCVD (Laser-induced Chemical Vapor Deposition) of fibers is studied theoretically. The shape of fibers and the temperature distribution are calculated self-consistently on the basis of a one-dimensional model which takes into account changes of the radius along the fiber. The influence of different parameters on the fiber radius and the temperature is discussed. The parameters investigated include the laser power and spot size, the activation energy of the deposition reaction, diffusion limitations in the gas phase, and temperature dependences of the heat conductivities of the deposit and the gas. The results are applied to the pyrolytic growth of Si fibers from SiH4 + H-2.

引用

页码：503 / 508

页数：6

共 23 条

[1] SIMULATION OF GROWTH IN PYROLYTIC LASER-CVD OF MICROSTRUCTURES .2. 2-DIMENSIONAL APPROACH [J].

ARNOLD, N ;

BAUERLE, D .

MICROELECTRONIC ENGINEERING, 1993, 20 (1-2) :43-54

[2]

ARNOLD N, 1994, APPL SURF SCI, V36, P457

[3] ON THE REACTION-KINETICS IN LASER-INDUCED PYROLYTIC CHEMICAL-PROCESSING [J].

BAUERLE, D ;

LUKYANCHUK, B ;

PIGLMAYER, K .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1990, 50 (04) :385-396

[4]

BAUERLE D, 1982, APPL PHYS LETT, V40, P819, DOI 10.1063/1.93272

[5] LASER GROWN SINGLE-CRYSTALS OF SILICON [J].

BAUERLE, D ;

LEYENDECKER, G ;

WAGNER, D ;

BAUSER, E ;

LU, YC .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 30 (03) :147-149

[6]

BAUERLE D, 1986, SPRINGER SERIES MATE, V1

[7]

Bauerle D., 2011, LASER PROCESSING CHE, V4

[8]

BAUM TH, 1991, SPIE P, V1598, P122

[9]

BENTINI GG, 1988, APPL PHYS A, V45, P821

[10]

BOYD IW, 1992, EMRS S P, V24

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