ON THE REACTION-KINETICS IN LASER-INDUCED PYROLYTIC CHEMICAL-PROCESSING

被引：25

作者：

BAUERLE, D

LUKYANCHUK, B

PIGLMAYER, K

机构：

[1] Angewandte Physik, Johannes-Kepler-Universität Linz, Linz

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1990年 / 50卷 / 04期

关键词：

42.5; 68; 82.65;

D O I：

10.1007/BF00323596

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Reaction rates, particle densities, and temperature distribution in pyrolytic (photothermal) laser-induced microchemical processing are investigated with respect to temperature and concentration-dependent transport coefficients, and with respect to the effect of thermal diffusion. While the model employed is particularly suitable for laser-induced chemical vapor deposition (LCVD), it can also be applied to many cases of laser-induced surface modification and dry-etching. © 1990 Springer-Verlag.

引用

页码：385 / 396

页数：12

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