Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique

被引：190

作者：

Lai, ND ^{[1
]}

Liang, WP

Lin, JH

Hsu, CC

Lin, CH

机构：

[1] Natl Chung Cheng Univ, Dept Phys, Chiayi 621, Taiwan

[2] Natl Chung Cheng Univ, Grad Inst Optomechatron, Chiayi 621, Taiwan

[3] Wu Feng Inst Technol, Dept Chem Engn, Chiayi 621, Taiwan

来源：

OPTICS EXPRESS | 2005年 / 13卷 / 23期

关键词：

D O I：

10.1364/OPEX.13.009605

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A simple and efficient optical interference method for fabricating high quality two-and three-dimensional (2D and 3D) periodic structures is demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures are created depending on the number of exposure and the rotation angle of the sample for each exposure. Square and hexagonal 2D structures are fabricated by a multi-exposure of two-beam interference pattern with a rotation angle of 900 and 600 between two different exposures, respectively. Three-exposure, in particular, results in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. The experimental results obtained with SU-8 photoresist are well in agreement with the theoretical predictions. Multi-exposure of two-beam interference technique should be very useful for fabrication of photonic crystals. (c) 2005 Optical Society of America.

引用

收藏

页码：9605 / 9611

页数：7

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